Results
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Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium / edited by Paul Mertens, Marc Meuris and Marc Heyns. by Series: Diffusion and defect data. Pt. B, Solid state phenomena ; ; v. 219.
Material type: Text; Format:
available online
; Literary form:
Not fiction
Publisher: Pfaffikon, Switzerland : TTP, 2014Distributor: Enfield, New Hampshire : Trans Tech Publications Ltd, [date of distribution not identified]Copyright date: ©2014
Availability: Items available for loan: OPJGU Sonepat- Campus (1).
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