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Ultra clean processing of semiconductor surfaces XI : selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium / edited by Paul Mertens, Marc Meuris and Marc Heyns. by Series: Diffusion and defect data. Pt. B, Solid state phenomena ; ; v. 195.
Material type: Text Text; Format: available online remote; Literary form: Not fiction
Publisher: Durnten-Zurich, Switzerland : Trans Tech Publications Ltd., [2013]Copyright date: ©2013
Other title:
  • UCPSS 2012
Online resources:
Availability: Items available for loan: OPJGU Sonepat- Campus (1).
Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium / edited by Paul Mertens, Marc Meuris and Marc Heyns. by Series: Diffusion and defect data. Pt. B, Solid state phenomena ; ; v. 219.
Material type: Text Text; Format: available online remote; Literary form: Not fiction
Publisher: Pfaffikon, Switzerland : TTP, 2014Distributor: Enfield, New Hampshire : Trans Tech Publications Ltd, [date of distribution not identified]Copyright date: ©2014
Online resources:
Availability: Items available for loan: OPJGU Sonepat- Campus (1).
Ultra Clean Processing of Semiconductor Surfaces XIII. by Series: Solid State Phenomena Vol. 255
Material type: Text Text; Format: available online remote; Literary form: Not fiction
Publication details: Zurich : Trans Tech Publications, 2016
Online resources:
Availability: Items available for loan: OPJGU Sonepat- Campus (1).
Pages

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