Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis
Material type: TextLanguage: German Series: Publication details: Karlsruhe KIT Scientific Publishing 2022Description: 1 electronic resource (220 p.)Content type:- text
- computer
- online resource
- 9783731511212
- KSP/1000136062
Item type | Home library | Collection | Call number | Materials specified | Status | Date due | Barcode | |
---|---|---|---|---|---|---|---|---|
Electronic-Books | OPJGU Sonepat- Campus | E-Books Open Access | Available |
Open Access Unrestricted online access star
Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack.
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http://creativecommons.org/licenses/by-sa/4.0
German
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