Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis
Kopf, Marlene
Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis - Karlsruhe KIT Scientific Publishing 2022 - 1 electronic resource (220 p.) - Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie 42 .
Open Access
Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack.
Creative Commons
German
9783731511212 KSP/1000136062
10.5445/KSP/1000136062 doi
Mechanical engineering & materials
Dämpfung damping atmosphere Drehratensensor gyroscope inertial sensor Inertialsensor MEMS sensor MEMS-Sensor Q factor Q-Faktor
Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis - Karlsruhe KIT Scientific Publishing 2022 - 1 electronic resource (220 p.) - Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie 42 .
Open Access
Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack.
Creative Commons
German
9783731511212 KSP/1000136062
10.5445/KSP/1000136062 doi
Mechanical engineering & materials
Dämpfung damping atmosphere Drehratensensor gyroscope inertial sensor Inertialsensor MEMS sensor MEMS-Sensor Q factor Q-Faktor