MARC details
| 000 -LEADER |
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| fixed length control field |
02279namaa2200505uu 4500 |
| 001 - CONTROL NUMBER |
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| control field |
oapen53694 |
| 003 - CONTROL NUMBER IDENTIFIER |
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| control field |
oapen |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
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| control field |
20231220173836.0 |
| 006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS--GENERAL INFORMATION |
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| fixed length control field |
m o d |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION |
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| fixed length control field |
cr|mn|---annan |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
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| fixed length control field |
220404s2022 xx |||||o ||| 0|ger d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| International Standard Book Number |
9783731511212 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| International Standard Book Number |
KSP/1000136062 |
| 024 7# - OTHER STANDARD IDENTIFIER |
|---|
| Standard number or code |
10.5445/KSP/1000136062 |
| Source of number or code |
doi |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
oapen |
| Transcribing agency |
oapen |
| 041 0# - LANGUAGE CODE |
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| Language code of text/sound track or separate title |
ger |
| 042 ## - AUTHENTICATION CODE |
|---|
| Authentication code |
dc |
| 072 #7 - SUBJECT CATEGORY CODE |
|---|
| Subject category code |
TG |
| Source |
bicssc |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Kopf, Marlene |
| Relator code |
auth |
| 9 (RLIN) |
1566989 |
| 245 10 - TITLE STATEMENT |
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| Title |
Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
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| Place of publication, distribution, etc |
Karlsruhe |
| Name of publisher, distributor, etc |
KIT Scientific Publishing |
| Date of publication, distribution, etc |
2022 |
| 300 ## - PHYSICAL DESCRIPTION |
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| Extent |
1 electronic resource (220 p.) |
| 336 ## - |
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| -- |
text |
| -- |
txt |
| -- |
rdacontent |
| 337 ## - |
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| -- |
computer |
| -- |
c |
| -- |
rdamedia |
| 338 ## - |
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| -- |
online resource |
| -- |
cr |
| -- |
rdacarrier |
| 490 1# - SERIES STATEMENT |
|---|
| Series statement |
Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie |
| Volume number/sequential designation |
42 |
| 506 0# - RESTRICTIONS ON ACCESS NOTE |
|---|
| Terms governing access |
Open Access |
| Standardized terminology for access restriction |
Unrestricted online access |
| Source of term |
star |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc |
Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack. |
| 540 ## - TERMS GOVERNING USE AND REPRODUCTION NOTE |
|---|
| Terms governing use and reproduction |
Creative Commons |
| -- |
by-sa/4.0 |
| -- |
cc |
| Uniform Resource Identifier |
<a href="http://creativecommons.org/licenses/by-sa/4.0">http://creativecommons.org/licenses/by-sa/4.0</a> |
| 546 ## - LANGUAGE NOTE |
|---|
| Language note |
German |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Mechanical engineering & materials |
| Source of heading or term |
bicssc |
| 9 (RLIN) |
1203599 |
| 653 ## - INDEX TERM--UNCONTROLLED |
|---|
| Uncontrolled term |
Dämpfung |
| 653 ## - INDEX TERM--UNCONTROLLED |
|---|
| Uncontrolled term |
damping atmosphere |
| 653 ## - INDEX TERM--UNCONTROLLED |
|---|
| Uncontrolled term |
Drehratensensor |
| 653 ## - INDEX TERM--UNCONTROLLED |
|---|
| Uncontrolled term |
gyroscope |
| 653 ## - INDEX TERM--UNCONTROLLED |
|---|
| Uncontrolled term |
inertial sensor |
| 653 ## - INDEX TERM--UNCONTROLLED |
|---|
| Uncontrolled term |
Inertialsensor |
| 653 ## - INDEX TERM--UNCONTROLLED |
|---|
| Uncontrolled term |
MEMS sensor |
| 653 ## - INDEX TERM--UNCONTROLLED |
|---|
| Uncontrolled term |
MEMS-Sensor |
| 653 ## - INDEX TERM--UNCONTROLLED |
|---|
| Uncontrolled term |
Q factor |
| 653 ## - INDEX TERM--UNCONTROLLED |
|---|
| Uncontrolled term |
Q-Faktor |
| 793 0# - |
|---|
| -- |
OAPEN Library. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
<a href="https://library.oapen.org/bitstream/id/98ac4f2c-7b88-44cb-bca3-4e6f32738f7a/9783731511212.pdf">https://library.oapen.org/bitstream/id/98ac4f2c-7b88-44cb-bca3-4e6f32738f7a/9783731511212.pdf</a> |
| -- |
0 |
| Public note |
Open Access: OAPEN Library, download the publication |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
<a href="https://library.oapen.org/handle/20.500.12657/53694">https://library.oapen.org/handle/20.500.12657/53694</a> |
| -- |
0 |
| Public note |
Open Access: OAPEN Library: description of the publication |
