Gettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK / edited by J.D. Murphy.

By:

(15th : Gettering and Defect Engineering in Semiconductor Technology Conference (15th : 2013 : Oxford, Great Britain)

Contributor(s):

Murphy, J. D [editor.]

Material type: Text

TextSeries: Diffusion and defect data. Pt. B, Solid state phenomena ; ; v. 205/206.Publisher: Durnten-Zurich : Trans Tech publications Ltd, [2014]Description: 1 online resource (xiv, 516 pages) : illustrations (black and whiteContent type:

text

Media type:

computer

Carrier type:

online resource

ISBN:

3038262056
9783038262053

Other title:

Gettering and defect engineering in semiconductor technology 15

Subject(s):

Genre/Form:

Additional physical formats: Print version:: No titleDDC classification:

621.3815/2 23

LOC classification:

TK7871.85 .G426 2013

Online resources:

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