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Gettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK /

Gettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK / Gettering and defect engineering in semiconductor technology 15 edited by J.D. Murphy. - 1 online resource (xiv, 516 pages) : illustrations (black and white. - Diffusion and defect data. Pt. B, Solid state phenomena, volumes 205/206 1012-0394 ; . - Diffusion and defect data. Pt. B, Solid state phenomena ; v. 205/206. .

Includes bibliographical references and index.

ISBN: 3038262056 (electronic bk.) 9783038262053 (electronic bk.) (paperback) (paperback)

Subjects--Topical Terms:
Semiconductors--Defects--Congresses.
Getters--Congresses.
Semi-conducteurs--Défauts--Congrès.
Getters--Congrès.
TECHNOLOGY & ENGINEERING--Mechanical.
Getters.
Semiconductors--Defects.

Index Terms--Genre/Form:
Electronic books.
Electronic books.
Conference papers and proceedings.

LC Class. No.: TK7871.85 / .G426 2013

Dewey Class. No.: 621.3815/2