SiC based Miniaturized Devices (Record no. 3008182)

MARC details
000 -LEADER
fixed length control field 04994naaaa2201093uu 4500
001 - CONTROL NUMBER
control field https://directory.doabooks.org/handle/20.500.12854/68646
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20220714185350.0
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number books978-3-03936-011-6
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9783039360109
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9783039360116
024 7# - OTHER STANDARD IDENTIFIER
Standard number or code 10.3390/books978-3-03936-011-6
Terms of availability doi
041 0# - LANGUAGE CODE
Language code of text/sound track or separate title English
042 ## - AUTHENTICATION CODE
Authentication code dc
072 #7 - SUBJECT CATEGORY CODE
Subject category code TBX
Source bicssc
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Saddow, Stephen Edward
Relator code edt
9 (RLIN) 1607987
245 10 - TITLE STATEMENT
Title SiC based Miniaturized Devices
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc Basel, Switzerland
Name of publisher, distributor, etc MDPI - Multidisciplinary Digital Publishing Institute
Date of publication, distribution, etc 2020
300 ## - PHYSICAL DESCRIPTION
Extent 1 electronic resource (170 p.)
506 0# - RESTRICTIONS ON ACCESS NOTE
Terms governing access Open Access
Source of term star
Standardized terminology for access restriction Unrestricted online access
520 ## - SUMMARY, ETC.
Summary, etc MEMS devices are found in many of today's electronic devices and systems, from air-bag sensors in cars to smart phones, embedded systems, etc. Increasingly, the reduction in dimensions has led to nanometer-scale devices, called NEMS. The plethora of applications on the commercial market speaks for itself, and especially for the highly precise manufacturing of silicon-based MEMS and NEMS. While this is a tremendous achievement, silicon as a material has some drawbacks, mainly in the area of mechanical fatigue and thermal properties. Silicon carbide (SiC), a well-known wide-bandgap semiconductor whose adoption in commercial products is experiening exponential growth, especially in the power electronics arena. While SiC MEMS have been around for decades, in this Special Issue we seek to capture both an overview of the devices that have been demonstrated to date, as well as bring new technologies and progress in the MEMS processing area to the forefront. Thus, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on: (1) novel designs, fabrication, control, and modeling of SiC MEMS and NEMS based on all kinds of actuation mechanisms; and (2) new developments in applying SiC MEMS and NEMS in consumer electronics, optical communications, industry, medicine, agriculture, space, and defense.
540 ## - TERMS GOVERNING USE AND REPRODUCTION NOTE
Terms governing use and reproduction Creative Commons
-- https://creativecommons.org/licenses/by/4.0/
-- cc
-- https://creativecommons.org/licenses/by/4.0/
546 ## - LANGUAGE NOTE
Language note English
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element History of engineering & technology
Source of heading or term bicssc
9 (RLIN) 1129967
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term high-power impulse magnetron sputtering (HiPIMS)
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Uncontrolled term silicon carbide
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Uncontrolled term aluminum nitride
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Uncontrolled term thin film
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Uncontrolled term Rutherford backscattering spectrometry (RBS)
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Uncontrolled term grazing incidence X-ray diffraction (GIXRD)
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Uncontrolled term Raman spectroscopy
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Uncontrolled term 6H-SiC
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Uncontrolled term indentation
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Uncontrolled term deformation
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Uncontrolled term material removal mechanisms
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Uncontrolled term critical load
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Uncontrolled term 4H-SiC
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Uncontrolled term critical depth of cut
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Uncontrolled term Berkovich indenter
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Uncontrolled term cleavage strength
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Uncontrolled term nanoscratching
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Uncontrolled term power electronics
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Uncontrolled term high-temperature converters
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Uncontrolled term MEMS devices
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Uncontrolled term SiC power electronic devices
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Uncontrolled term neural interface
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Uncontrolled term neural probe
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Uncontrolled term neural implant
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Uncontrolled term microelectrode array
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Uncontrolled term MEA
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Uncontrolled term SiC
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Uncontrolled term 3C-SiC
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Uncontrolled term doped SiC
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Uncontrolled term n-type
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Uncontrolled term p-type
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Uncontrolled term amorphous SiC
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Uncontrolled term epitaxial growth
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Uncontrolled term electrochemical characterization
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Uncontrolled term MESFET
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Uncontrolled term simulation
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Uncontrolled term PAE
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Uncontrolled term bulk micromachining
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Uncontrolled term electrochemical etching
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Uncontrolled term circular membrane
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Uncontrolled term bulge test
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Uncontrolled term vibrometry
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Uncontrolled term mechanical properties
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Uncontrolled term Young's modulus
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Uncontrolled term residual stress
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Uncontrolled term FEM
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Uncontrolled term semiconductor radiation detector
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Uncontrolled term microstrip detector
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Uncontrolled term power module
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Uncontrolled term negative gate-source voltage spike
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Uncontrolled term 4H-SiC, epitaxial layer
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Uncontrolled term Schottky barrier
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Uncontrolled term radiation detector
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Uncontrolled term point defects
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Uncontrolled term deep level transient spectroscopy (DLTS)
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Uncontrolled term thermally stimulated current spectroscopy (TSC)
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Uncontrolled term electron beam induced current spectroscopy (EBIC)
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Uncontrolled term pulse height spectroscopy (PHS)
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Uncontrolled term n/a
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Alquier, Daniel
Relator code edt
9 (RLIN) 604224
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Wang, Jing
Relator code edt
9 (RLIN) 431684
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name La Via, Francesco
Relator code edt
9 (RLIN) 1596914
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Fraga, Mariana
Relator code edt
9 (RLIN) 1607988
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Saddow, Stephen Edward
Relator code oth
9 (RLIN) 1607987
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Alquier, Daniel
Relator code oth
9 (RLIN) 604224
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Wang, Jing
Relator code oth
9 (RLIN) 431684
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name La Via, Francesco
Relator code oth
9 (RLIN) 1596914
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Fraga, Mariana
Relator code oth
9 (RLIN) 1607988
856 40 - ELECTRONIC LOCATION AND ACCESS
Host name www.oapen.org
Uniform Resource Identifier <a href="https://mdpi.com/books/pdfview/book/2408">https://mdpi.com/books/pdfview/book/2408</a>
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Public note DOAB: download the publication
856 40 - ELECTRONIC LOCATION AND ACCESS
Host name www.oapen.org
Uniform Resource Identifier <a href="https://directory.doabooks.org/handle/20.500.12854/68646">https://directory.doabooks.org/handle/20.500.12854/68646</a>
-- 0
Public note DOAB: description of the publication
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