MARC details
000 -LEADER |
fixed length control field |
04994naaaa2201093uu 4500 |
001 - CONTROL NUMBER |
control field |
https://directory.doabooks.org/handle/20.500.12854/68646 |
005 - DATE AND TIME OF LATEST TRANSACTION |
control field |
20220714185350.0 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
books978-3-03936-011-6 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
9783039360109 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
9783039360116 |
024 7# - OTHER STANDARD IDENTIFIER |
Standard number or code |
10.3390/books978-3-03936-011-6 |
Terms of availability |
doi |
041 0# - LANGUAGE CODE |
Language code of text/sound track or separate title |
English |
042 ## - AUTHENTICATION CODE |
Authentication code |
dc |
072 #7 - SUBJECT CATEGORY CODE |
Subject category code |
TBX |
Source |
bicssc |
100 1# - MAIN ENTRY--PERSONAL NAME |
Personal name |
Saddow, Stephen Edward |
Relator code |
edt |
9 (RLIN) |
1607987 |
245 10 - TITLE STATEMENT |
Title |
SiC based Miniaturized Devices |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
Place of publication, distribution, etc |
Basel, Switzerland |
Name of publisher, distributor, etc |
MDPI - Multidisciplinary Digital Publishing Institute |
Date of publication, distribution, etc |
2020 |
300 ## - PHYSICAL DESCRIPTION |
Extent |
1 electronic resource (170 p.) |
506 0# - RESTRICTIONS ON ACCESS NOTE |
Terms governing access |
Open Access |
Source of term |
star |
Standardized terminology for access restriction |
Unrestricted online access |
520 ## - SUMMARY, ETC. |
Summary, etc |
MEMS devices are found in many of today's electronic devices and systems, from air-bag sensors in cars to smart phones, embedded systems, etc. Increasingly, the reduction in dimensions has led to nanometer-scale devices, called NEMS. The plethora of applications on the commercial market speaks for itself, and especially for the highly precise manufacturing of silicon-based MEMS and NEMS. While this is a tremendous achievement, silicon as a material has some drawbacks, mainly in the area of mechanical fatigue and thermal properties. Silicon carbide (SiC), a well-known wide-bandgap semiconductor whose adoption in commercial products is experiening exponential growth, especially in the power electronics arena. While SiC MEMS have been around for decades, in this Special Issue we seek to capture both an overview of the devices that have been demonstrated to date, as well as bring new technologies and progress in the MEMS processing area to the forefront. Thus, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on: (1) novel designs, fabrication, control, and modeling of SiC MEMS and NEMS based on all kinds of actuation mechanisms; and (2) new developments in applying SiC MEMS and NEMS in consumer electronics, optical communications, industry, medicine, agriculture, space, and defense. |
540 ## - TERMS GOVERNING USE AND REPRODUCTION NOTE |
Terms governing use and reproduction |
Creative Commons |
-- |
https://creativecommons.org/licenses/by/4.0/ |
-- |
cc |
-- |
https://creativecommons.org/licenses/by/4.0/ |
546 ## - LANGUAGE NOTE |
Language note |
English |
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
History of engineering & technology |
Source of heading or term |
bicssc |
9 (RLIN) |
1129967 |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
high-power impulse magnetron sputtering (HiPIMS) |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
silicon carbide |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
aluminum nitride |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
thin film |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
Rutherford backscattering spectrometry (RBS) |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
grazing incidence X-ray diffraction (GIXRD) |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
Raman spectroscopy |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
6H-SiC |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
indentation |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
deformation |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
material removal mechanisms |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
critical load |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
4H-SiC |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
critical depth of cut |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
Berkovich indenter |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
cleavage strength |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
nanoscratching |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
power electronics |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
high-temperature converters |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
MEMS devices |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
SiC power electronic devices |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
neural interface |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
neural probe |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
neural implant |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
microelectrode array |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
MEA |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
SiC |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
3C-SiC |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
doped SiC |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
n-type |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
p-type |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
amorphous SiC |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
epitaxial growth |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
electrochemical characterization |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
MESFET |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
simulation |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
PAE |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
bulk micromachining |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
electrochemical etching |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
circular membrane |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
bulge test |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
vibrometry |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
mechanical properties |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
Young's modulus |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
residual stress |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
FEM |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
semiconductor radiation detector |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
microstrip detector |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
power module |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
negative gate-source voltage spike |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
4H-SiC, epitaxial layer |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
Schottky barrier |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
radiation detector |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
point defects |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
deep level transient spectroscopy (DLTS) |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
thermally stimulated current spectroscopy (TSC) |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
electron beam induced current spectroscopy (EBIC) |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
pulse height spectroscopy (PHS) |
653 ## - INDEX TERM--UNCONTROLLED |
Uncontrolled term |
n/a |
700 1# - ADDED ENTRY--PERSONAL NAME |
Personal name |
Alquier, Daniel |
Relator code |
edt |
9 (RLIN) |
604224 |
700 1# - ADDED ENTRY--PERSONAL NAME |
Personal name |
Wang, Jing |
Relator code |
edt |
9 (RLIN) |
431684 |
700 1# - ADDED ENTRY--PERSONAL NAME |
Personal name |
La Via, Francesco |
Relator code |
edt |
9 (RLIN) |
1596914 |
700 1# - ADDED ENTRY--PERSONAL NAME |
Personal name |
Fraga, Mariana |
Relator code |
edt |
9 (RLIN) |
1607988 |
700 1# - ADDED ENTRY--PERSONAL NAME |
Personal name |
Saddow, Stephen Edward |
Relator code |
oth |
9 (RLIN) |
1607987 |
700 1# - ADDED ENTRY--PERSONAL NAME |
Personal name |
Alquier, Daniel |
Relator code |
oth |
9 (RLIN) |
604224 |
700 1# - ADDED ENTRY--PERSONAL NAME |
Personal name |
Wang, Jing |
Relator code |
oth |
9 (RLIN) |
431684 |
700 1# - ADDED ENTRY--PERSONAL NAME |
Personal name |
La Via, Francesco |
Relator code |
oth |
9 (RLIN) |
1596914 |
700 1# - ADDED ENTRY--PERSONAL NAME |
Personal name |
Fraga, Mariana |
Relator code |
oth |
9 (RLIN) |
1607988 |
856 40 - ELECTRONIC LOCATION AND ACCESS |
Host name |
www.oapen.org |
Uniform Resource Identifier |
<a href="https://mdpi.com/books/pdfview/book/2408">https://mdpi.com/books/pdfview/book/2408</a> |
-- |
0 |
Public note |
DOAB: download the publication |
856 40 - ELECTRONIC LOCATION AND ACCESS |
Host name |
www.oapen.org |
Uniform Resource Identifier |
<a href="https://directory.doabooks.org/handle/20.500.12854/68646">https://directory.doabooks.org/handle/20.500.12854/68646</a> |
-- |
0 |
Public note |
DOAB: description of the publication |