Abbildende Ellipsometrie mit Lichtwegumkehrung f�r die optische Charakterisierung von gekr�mmten Oberfl�chen
Negara, Christian Emanuel
Abbildende Ellipsometrie mit Lichtwegumkehrung f�r die optische Charakterisierung von gekr�mmten Oberfl�chen - KIT Scientific Publishing 2023 - 1 electronic resource (324 p.) - Schriftenreihe Automatische Sichtpr�fung und Bildverarbeitung 6 .
Open Access
Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and related questions regarding the measurement function, evaluation algorithms and ambiguities as well as degrees of freedom of the solution set are examined in this work.
Creative Commons
German
KSP/1000158762
10.5445/KSP/1000158762 doi
Maths for computer scientists
imaging; retroreflection; curved surface; ellipsometry; bildgebend; Retroreflexion; gekr�mmte Oberfl�che; Ellipsometrie; metrology; Messtechnik
Abbildende Ellipsometrie mit Lichtwegumkehrung f�r die optische Charakterisierung von gekr�mmten Oberfl�chen - KIT Scientific Publishing 2023 - 1 electronic resource (324 p.) - Schriftenreihe Automatische Sichtpr�fung und Bildverarbeitung 6 .
Open Access
Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and related questions regarding the measurement function, evaluation algorithms and ambiguities as well as degrees of freedom of the solution set are examined in this work.
Creative Commons
German
KSP/1000158762
10.5445/KSP/1000158762 doi
Maths for computer scientists
imaging; retroreflection; curved surface; ellipsometry; bildgebend; Retroreflexion; gekr�mmte Oberfl�che; Ellipsometrie; metrology; Messtechnik