000 | 06540cam a2200889 i 4500 | ||
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001 | ocn854583694 | ||
003 | OCoLC | ||
005 | 20220711204132.0 | ||
006 | m o d | ||
007 | cr ||||||||||| | ||
008 | 130411s2013 nyu ob 001 0 eng | ||
010 | _a 2020687136 | ||
040 |
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019 | _a858126055 | ||
020 |
_z9781626180345 _q(ebook) |
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020 |
_a9781624179594 _q(hardcover) |
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020 | _a1624179592 | ||
020 |
_a1626180342 _q(electronic bk.) |
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020 |
_a9781626180345 _q(electronic bk.) |
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_a(OCoLC)854583694 _z(OCoLC)858126055 |
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_aeng _hrus |
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050 | 0 | 0 | _aTK7871.15.S55 |
072 | 7 |
_aTEC _x008010 _2bisacsh |
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082 | 0 | 0 |
_a621.3815/31 _223 |
049 | _aMAIN | ||
100 | 1 |
_aVasilʹev, V. I︠U︡. _q(Vladislav I︠U︡rʹevich) _9958834 |
|
240 | 1 | 0 |
_aTonkie sloi borofosforosilikatnogo stekla v tekhnologii kremnievoæi mikroçelektroniki. _lEnglish |
245 | 1 | 0 |
_aBorophosphosilicate glass thin films in electronics / _cVladislav Yu. Vasilyev. |
264 | 1 |
_aNew York : _bNova Science Publishers, _c[2013] |
|
300 | _a1 online resource. | ||
336 |
_atext _btxt _2rdacontent |
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337 |
_acomputer _bc _2rdamedia |
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338 |
_aonline resource _bcr _2rdacarrier |
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490 | 1 | _aMaterials science and technologies | |
490 | 0 | _aElectronics and telecommunications research | |
500 | _aTranslation of: Tonkie sloi borofosforosilikatnogo stekla v tekhnologii kremnievoĭ mikroėlektroniki. | ||
504 | _aIncludes bibliographical references (pages 221-234) and index. | ||
588 | _aDescription based on print version record and CIP data provided by publisher. | ||
505 | 0 | _aBOROPHOSPHOSILICATE GLASS THIN FILMS IN ELECTRONICS ; Library of Congress Cataloging-in-Publication Data ; CONTENTS ; PREFACE ; LIST OF ABBREVIATIONS (IN ORDER OF APPEARANCE) ; LIST OF IMPORTANT SYMBOLS (IN ORDER OF APPEARANCE); INTRODUCTION ; PART 1. BPSG THIN FILM DEPOSITION; Chapter 1 BRIEF HISTORICAL OVERVIEW OF BPSG THIN FILM RESEARCH ; Chapter 2 BASIC BPSG FILM CVD TOOLS AND METHODOLOGY ; 2.1. CVD PROCESS COMPOUNDS ; 2.2. BASIC CVD TOOL DESIGN FOR SILICON DIOXIDE AND GLASS FILM DEPOSITION ; 2.3. SOME BASIC THIN FILM CVD PROCESS PARAMETERS. | |
505 | 8 | _aChapter 3 BASIC BPSG CVD KINETIC FEATURES 3.1. BASIC THIN FILM CVD KINETIC FEATURES ; 3.2. BASIC SILICON DIOXIDE THIN FILM CVD KINETIC FEATURES ; 3.3. BASIC SILICATE GLASS THIN FILM CVD KINETIC FEATURES ; 3.4. BASIC AEROSOL FORMATION FEATURES AT GLASS CVD ; Chapter 4 AS-DEPOSITED BPSG FILM STEP COVERAGE AND GAP-FILL ; 4.1. BASIC DEFINITIONS OF STEPPED DEVICE STRUCTURES ; 4.2. BASIC DEFINITIONS FOR THIN FILM CVD ON STEPPED DEVICE STRUCTURES ; 4.3. CHARACTERIZATION OF CVD PROCESSES ON STEPPED STRUCTURES ; 4.4. IMPROVEMENT OF GLASS FILM CVD ON STEPPED STRUCTURES. | |
505 | 8 | _aChapter 5 GLASS FILM CVD SCHEMES 5.1. GENERAL THIN FILM CVD PROCESS SCHEME ; 5.2. CVD THIN FILM DEPOSITION PROCESSES CLASSIFICATION ; 5.3. THIN FILM SIO AND SILICATE GLASS DEPOSITION PROCESSES SCHEMES 2; Chapter 6 BPSG FILM INDUSTRIAL CVD TECHNOLOGY ; FINAL REMARKS ON PART 1 ; PART 2. BPSG FILM COMPOSITION, STRUCTURE, AND PROPERTIES ; Chapter 7 BRIEF REVIEW ON BPSG THIN FILM ANALYSIS TECHNIQUES ; 7.1. ANALYTICAL METHODS OVERVIEW ; 7.2. FTIR METHOD IMPLEMENTATION BPSG FILM COMPOSITION ANALYSIS ; 7.3. LASER SCANNING METHOD ; 7.4. MICROSCOPY METHODS. | |
505 | 8 | _a7.5. TOTAL CHARGE MAPPING METHODS 7.6. SECONDARY ION MASS SPECTROMETRY METHOD ; Chapter 8 BPSG FILM COMPOSITION ; Chapter 9 BPSG FILM STRUCTURE ; 9.1. BRIEF REVIEW OF SILICA STRUCTURE: BASICS AND TERMS ; 9.2. BRIEF REVIEW OF BORON OXIDE AND PHOSPHORUS OXIDE STRUCTURES ; 9.3. BPSG COMPOSITION AND STRUCTURE ; 9.4. DIFFERENCES IN BPSG COMPOSITION AND STRUCTURE ; Chapter 10 BASIC BPSG FILM PROPERTIES ; 10.1. SURFACE MORPHOLOGY OF THIN GLASS FILMS ; 10.2. FILM MECHANICAL STRESS ; 10.3. FILM DENSITY -- FILM POROSITY -- FILM SHRINKAGE ; 10.4. FILM WET ETCH RATE. | |
505 | 8 | _a10.5. GETTERING PROPERTIES OF BPSG FILMS10.6. ELECTRICAL PROPERTIES OF BPSG FILMS ; 10.7. SUMMARIES OF BPSG FILM PROPERTIES FOR PRODUCTION PROCESSES ; Chapter 11 BPSG FILM FLOW CAPABILITY ; 11.1. BRIEF DESCRIPTION OF GLASS FLOW BASICS ; 11.2. GLASS STRUCTURE FEATURES AND GLASS FLOW CAPABILITY ; 11.3. APPLICATION OF BULK GLASS PARAMETERS TO GLASS THIN FILM ; Chapter 12 BPSG FILM -- AMBIENT MOISTURE INTERACTION ; 12.1. TECHNIQUE FOR ANALYSIS OF MOISTURE EFFECTS IN THIN GLASS FILMS ; 12.2. FILM-MOISTURE INTERACTION ; 12.3. DESCRIPTION OF MOISTURE ABSORPTION EFFECTS IN BPSG FILMS. | |
546 | _aText in English. | ||
590 |
_aeBooks on EBSCOhost _bEBSCO eBook Subscription Academic Collection - Worldwide |
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650 | 0 |
_aElectronic apparatus and appliances _xMaterials. _9150701 |
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650 | 0 |
_aGlass coatings. _9958835 |
|
650 | 0 |
_aBoron compounds. _9599632 |
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650 | 0 |
_aSilicon compounds. _9920067 |
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650 | 0 |
_aGlass manufacture _xChemistry. _9958836 |
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650 | 2 |
_aBoron Compounds _9599632 |
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650 | 2 |
_aSilicon Compounds _9920067 |
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650 | 6 |
_aVerre _xRevêtements protecteurs. _9958837 |
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650 | 6 |
_aBore _xComposés. _9958838 |
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650 | 6 |
_aSilicium _xComposés. _9958839 |
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650 | 7 |
_aTECHNOLOGY & ENGINEERING _xElectronics _xCircuits _xGeneral. _2bisacsh _938237 |
|
650 | 7 |
_aBoron compounds. _2fast _0(OCoLC)fst00836715 _9599632 |
|
650 | 7 |
_aElectronic apparatus and appliances _xMaterials. _2fast _0(OCoLC)fst00906813 _9150701 |
|
650 | 7 |
_aGlass coatings. _2fast _0(OCoLC)fst00943107 _9958835 |
|
650 | 7 |
_aGlass manufacture _xChemistry. _2fast _0(OCoLC)fst00943193 _9958836 |
|
650 | 7 |
_aSilicon compounds. _2fast _0(OCoLC)fst01118665 _9920067 |
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655 | 0 | _aElectronic books. | |
655 | 4 |
_a7 _aElectronic books. _9848615 |
|
700 | 1 |
_aVasilʹev, V. I︠U︡. _q(Vladislav I︠U︡rʹevich) _9958834 |
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776 | 0 | 8 |
_iPrint version: _tBorophosphosilicate glass thin films in electronics _dNew York : Nova Science Publishers, Inc., [2013] _z9781624179594 (hardcover) _w(DLC) 2013002527 |
830 | 0 |
_aMaterials science and technologies series. _9926602 |
|
856 | 4 | 0 | _uhttps://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=619652 |
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