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X-ray optics made by X-ray lithography: Process optimization and quality control

By:

Koch, Frieder Johannes [auth]

Material type: Article

ArticleLanguage: English Publication details: KIT Scientific Publishing 2017Description: 1 electronic resource (X, 138 p. p.)ISBN:

KSP/1000070029
9783731506799

Subject(s):

Online resources:

Summary: Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio - their fabrication by X-ray lithography with optimal structure quality is the topic of this work.

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Item type	Home library	Collection	Call number	Materials specified	Status	Date due	Barcode
Electronic-Books	OPJGU Sonepat- Campus	E-Books Open Access			Available

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Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio - their fabrication by X-ray lithography with optimal structure quality is the topic of this work.

Creative Commons https://creativecommons.org/licenses/by-sa/4.0/ cc https://creativecommons.org/licenses/by-sa/4.0/

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