Sensors and measurement systems / Walter Lang.

Includes bibliographical references and index.

Online resource; title from PDF title page (EBSCO, viewed March 7, 2019)

Acknowledgment ix List of Figures xi List of Tables xix List of Abbreviations xxi Introduction: The Idea of This Book 1 1 Thermal Sensors 7 1.1 Measuring the Temperature 7 1.1.1 Thermoelectric Effect (Seebeck Effect) 8 1.1.2 Thermoresistive Effect 13 1.1.3 Pyroelectric Effect 15 1.2 Radiation Thermometer 16 1.2.1 Static Modeling of Thermal Transport and Understanding Sensitivity 20 1.2.2 Modeling Dynamic Behavior 24 1.2.3 The Noise of the Thermopile 28 1.2.4 Sensor Electronics: Building the System 32 1.2.5 The Alternatives: Pyroelectric Sensor and Bolometer 33 1.3 A Topical Application Example: Infrared Gas Sensing of Ethylene 35 1.4 Important Terms and Definitions for Sensor Characterization 38 1.5 Excursus to Wireless Sensor Networks 41 Questions 45 2 Sensor Technology 47 2.1 Basics of Microtechnology 47 2.2 Thin Films 49 2.2.1 Silicon as a Substrate 49 2.2.2 Thin Films 49 2.2.3 Thin-Film Deposition Methods: An Overview 53 2.2.4 Physical Vapor Deposition (PVD) 53 2.2.5 Chemical Vapor Deposition (CVD) 59 2.2.6 Oxidation of Silicon 62 2.2.7 Surface Migration and Step Coverage 63 2.3 Thin-Film Deposition Control 64 2.3.1 Metal Films: Measuring Sheet Resistance 65 2.3.2 Dielectric Films: Interferometers 66 2.3.3 Doping 68 2.4 Wafer Bonding 68 2.4.1 Silicon Fusion Bonding 68 2.4.2 Anodic Bonding 69 2.5 Making Structures 70 2.5.1 Lithography 70 2.5.2 Etching Fundamentals 74 2.5.3 Anisotropic Wet Etching of Silicon 76 2.5.4 Dry Etching 79 2.6 The Thermopile Process 83 2.7 The Recent Trend: Flexible Structures and Polymer MEMS 90 Questions 94 3 Force and Pressure Sensors 95 3.1 The Piezoresistive Effect 95 3.2 Strain Gauges and Force Sensing 98 3.3 Pressure Sensors: Dimensions, Ranges and Applications 99 3.4 Piezoresistive Pressure Sensors 102 3.4.1 Steel Membrane Sensors 102 3.4.2 Silicon Membrane Sensors 105 3.5 From the Wafer to the System -- Technology of the Silicon Pressure Sensor 106 3.5.1 Silicon Technology 106 3.5.2 Electric Test Structures 109 3.5.3 Mounting and Housing Technology 113 3.5.4 Integrating MEMS and Electronics 115 3.5.5 Example of a Commercial Pressure Sensor 118 3.5.6 Sensor Electronics 121 3.5.7 Calibration 126 3.5.8 System Test, Reliability and Failure Modes 127 3.6 Capacitive Pressure Sensors 129 3.7 The Recent Trend: Additive Technology and Printed Sensors 134 Questions 141 4 Inertial Sensors 143 4.1 Inertial Measurement of Motion 143 4.2 Acceleration Sensors 144 4.2.1 Applications and Ranges 144 4.2.2 Sensor Principles and Resonance 147 4.2.3 Layout and Technology 150 4.2.4 Accelerometer Electronics 153 4.2.5 Resolution and Noise 155 4.3 Angular Rate Sensors 157 4.3.1 Applications and Ranges 158 4.3.2 Sensor Idea and Coriolis Force 160 4.3.3 Layout 161 4.3.4 Technology 168 4.3.5 Movement and Noise 171 4.3.6 Inertial Measurement Units (IMU) and Sensor Fusion 173 Questions 175 5 Magnetic Sensors 177 5.1 Dimensions, Ranges and Applications 177 5.2 The Hall Sensor 178 5.3 The Resistive Hall Probe 181 5.4 The Giant Magnetoresistive Effect 182 5.5 The Tunneling Magnetoresistive Sensor 184 5.6 The Fluxgate Sensor 187 Questions 191 6 Flow Sensors 193 6.1 Ranges and Applications 193 6.2 Types of Flow Sensors 195 6.3 Pressure Sensors for Flow Measurement 195 6.4 Coriolis Flow Sensor 198 6.5 Electromagnetic Flow Sensor 201 6.6 Thermal Flow Sensor 202 6.6.1 Hot Wire Probe 202 6.6.2 The Mass Flow Controller 203 6.6.3 Thermal Membrane Flow Sensors 204 6.6.4 Modeling of the Thermal Anemometer 208 Questions 213 Index 215 About the Author 221.

Sensors and measurement systems is an introduction to microsensors for engineering students in the final undergraduate or early graduate level, technicians who wants to know more about the systems they are using, and anybody curious enough to know what microsystems and microsensors can do. The book discusses five families of sensors: * Thermal sensors * Force and pressure sensors * Inertial sensors * Magnetic field sensors * Flow sensors For each sensor, theoretical, technology and application aspects are examined. The sensor function is modelled to understand sensitivity, resolution and noise. We ask ourselves: What do we want to measure? What are possible applications? How are the sensor chips made in the cleanroom? How are they mounted and integrated in a system? After reading this book, you should be able to: * Understand important thermal, mechanical, inertial and magnetic sensors * Work with characterization parameters for sensors * Choose sensors for a given application and apply them * Understand micromachining technologies for sensors.

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