TY  - GEN
AU  - Koley,Goutam
AU  - Jahangir,Ifat
TI  - MEMS/NEMS Sensors: Fabrication and Application
SN  - books978-3-03921-635-2
PY  - 2019///
PB  - MDPI - Multidisciplinary Digital Publishing Institute
KW  - vibrating ring gyroscope
KW  - n/a
KW  - tunnel magnetoresistive effect
KW  - optical sensor
KW  - micro-NIR spectrometer
KW  - pulse inertia force
KW  - gas sensor
KW  - wet etching
KW  - oil detection
KW  - glass welding
KW  - spring design
KW  - power consumption
KW  - MEMS (micro-electro-mechanical system)
KW  - back cavity
KW  - deflection position detector
KW  - magnetic
KW  - MEMS
KW  - single-layer SiO2
KW  - frequency tuning
KW  - threshold accuracy
KW  - suspended micro hotplate
KW  - AlGaN/GaN circular HFETs
KW  - quadrature modulation signal
KW  - inertial switch
KW  - nanoparticle sensor
KW  - low noise
KW  - photonic crystal nanobeam cavity
KW  - floating slug
KW  - infrared image
KW  - backstepping approach
KW  - microdroplet
KW  - acceleration switch
KW  - microgyroscope
KW  - temperature uniformity
KW  - methane
KW  - microfluidic
KW  - accelerometer design
KW  - photonic crystal cavity
KW  - anisotropy
KW  - resonant frequency
KW  - dual-mass MEMS gyroscope
KW  - analytical model
KW  - single crystal silicon
KW  - temperature sensor
KW  - micro fluidic
KW  - refractive index sensor
KW  - microwave measurement
KW  - low zero-g offset
KW  - femtosecond laser
KW  - micropellistor
KW  - rapid fabrication
KW  - accelerometer
KW  - tracking performance
KW  - GaN diaphragm
KW  - microactuator
KW  - resistance parameter
KW  - optomechanical sensor
KW  - scanning grating mirror
KW  - GaAs MMIC
KW  - adaptive control
KW  - frequency split
KW  - frequency mismatch
KW  - electrostatic force feedback
KW  - thermoelectric power sensor
KW  - squeeze-film damping
KW  - silicon
KW  - wideband
KW  - Accelerometer readout
KW  - bonding strength
KW  - high temperature pressure sensors
KW  - 3D simulation
KW  - level-set method
KW  - tetramethylammonium hydroxide (TMAH)
N1  - Open Access
N2  - Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors. Despite a long history of development, fabrication of novel MEMS/NEMS devices still poses unique challenges due to their requirement for a suspended geometry; and many new fabrication techniques have been proposed to overcome these challenges. However, further development of these techniques is still necessary, as newer materials such as compound semiconductors, and 2-dimensional materials are finding their way in various MEMS/NEMS applications, with more complex structures and potentially smaller dimensions
UR  - https://mdpi.com/books/pdfview/book/1827
UR  - https://directory.doabooks.org/handle/20.500.12854/53149
ER  -