TY  - GEN
AU  - Kopf,Marlene
TI  - Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis
SN  - KSP/1000136062
PY  - 2022///
CY  - Karlsruhe
PB  - KIT Scientific Publishing
KW  - Mechanical engineering & materials
KW  - bicssc
KW  - MEMS-Sensor
KW  - Drehratensensor
KW  - Inertialsensor
KW  - Dämpfung
KW  - Q-Faktor
KW  - MEMS sensor
KW  - gyroscope
KW  - inertial sensor
KW  - damping atmosphere
KW  - Q factor
N1  - Open Access
N2  - Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack
UR  - https://library.oapen.org/bitstream/20.500.12657/53694/1/9783731511212.pdf
UR  - https://directory.doabooks.org/handle/20.500.12854/80561
ER  -