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Introduction to microelectromechanical microwave systems / Héctor J. de los Santos.

By: Material type: TextTextSeries: Artech House MEMS and sensors library | Microelectromechanical systems seriesPublication details: Boston : Artech House, ©2004.Edition: 2nd edDescription: 1 online resource (xiii, 221 pages) : illustrationsContent type:
  • text
Media type:
  • computer
Carrier type:
  • online resource
ISBN:
  • 158053872X
  • 9781580538725
  • 9781580538718
  • 1580538711
Subject(s): Genre/Form: Additional physical formats: Print version:: Introduction to microelectromechanical microwave systems.DDC classification:
  • 621.381/3 22
LOC classification:
  • TK7876 .S28 2004eb
Online resources:
Contents:
Introduction to Microelectromechanical Microwave Systems; Contents; Preface xi; Acknowledgments xxi; 1 Microelectromechanical Systems 1; 2 Fundamental MEMS Device Physics 25; 3 Fundamental MEMS Devices: The MEM Switch 59; 4 Fundamental MEMS Devices: The MEM Resonator 87; 5 Microwave MEMS Applications 121; 6 MEMS-Based Microwave Circuits and Systems 173; Glossary 209; About the Author 211; Index 213
Summary: Annotation The second edition covers the latest in fabrication technologies, actuation mechanisms, packaging, switching, resonator design, and microwave and wireless applications. This practical book steers readers past the drawbacks and towards the benefits of integrating RF/microwave MEMS into communications equipment.
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Electronic-Books Electronic-Books OPJGU Sonepat- Campus E-Books EBSCO Available

Includes bibliographical references and index.

Annotation The second edition covers the latest in fabrication technologies, actuation mechanisms, packaging, switching, resonator design, and microwave and wireless applications. This practical book steers readers past the drawbacks and towards the benefits of integrating RF/microwave MEMS into communications equipment.

Print version record.

Introduction to Microelectromechanical Microwave Systems; Contents; Preface xi; Acknowledgments xxi; 1 Microelectromechanical Systems 1; 2 Fundamental MEMS Device Physics 25; 3 Fundamental MEMS Devices: The MEM Switch 59; 4 Fundamental MEMS Devices: The MEM Resonator 87; 5 Microwave MEMS Applications 121; 6 MEMS-Based Microwave Circuits and Systems 173; Glossary 209; About the Author 211; Index 213

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