Microelectromechanical systems : advanced materials and fabrication methods / Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
Material type:
TextPublication details: Washington, DC : National Academy Press, 1997.Description: 1 online resource (xiv, 61 pages) : illustrationsContent type: - text
- computer
- online resource
- 0309059801
- 9780309059800
- 0585002509
- 9780585002507
- 9786610187096
- 6610187096
- Microelectronics -- Materials
- Microelectromechanical systems -- Design and construction
- Microélectronique -- Matériaux
- Microsystèmes électromécaniques -- Conception et construction
- TECHNOLOGY & ENGINEERING
- Electronics / Microelectronics
- TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics
- TECHNOLOGY & ENGINEERING -- Electronics -- Digital
- Microelectromechanical systems -- Design and construction
- Microelectronics -- Materials
- Andre fag (naturvidenskab og teknik) Andre fag
- 621.381 21
- TK7874
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Electronic-Books
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OPJGU Sonepat- Campus | E-Books EBSCO | Available |
Includes bibliographical references (pages 51-55).
Print version record.
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