MARC details
| 000 -LEADER |
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| fixed length control field |
04762naaaa2201141uu 4500 |
| 001 - CONTROL NUMBER |
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| control field |
https://directory.doabooks.org/handle/20.500.12854/53149 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
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| control field |
20220714174531.0 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| International Standard Book Number |
books978-3-03921-635-2 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| International Standard Book Number |
9783039216352 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| International Standard Book Number |
9783039216345 |
| 024 7# - OTHER STANDARD IDENTIFIER |
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| Standard number or code |
10.3390/books978-3-03921-635-2 |
| Terms of availability |
doi |
| 041 0# - LANGUAGE CODE |
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| Language code of text/sound track or separate title |
English |
| 042 ## - AUTHENTICATION CODE |
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| Authentication code |
dc |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
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| Personal name |
Koley, Goutam |
| Relator code |
auth |
| 9 (RLIN) |
1591697 |
| 245 10 - TITLE STATEMENT |
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| Title |
MEMS/NEMS Sensors: Fabrication and Application |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
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| Name of publisher, distributor, etc |
MDPI - Multidisciplinary Digital Publishing Institute |
| Date of publication, distribution, etc |
2019 |
| 300 ## - PHYSICAL DESCRIPTION |
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| Extent |
1 electronic resource (242 p.) |
| 506 0# - RESTRICTIONS ON ACCESS NOTE |
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| Terms governing access |
Open Access |
| Source of term |
star |
| Standardized terminology for access restriction |
Unrestricted online access |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc |
Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors. Despite a long history of development, fabrication of novel MEMS/NEMS devices still poses unique challenges due to their requirement for a suspended geometry; and many new fabrication techniques have been proposed to overcome these challenges. However, further development of these techniques is still necessary, as newer materials such as compound semiconductors, and 2-dimensional materials are finding their way in various MEMS/NEMS applications, with more complex structures and potentially smaller dimensions. |
| 540 ## - TERMS GOVERNING USE AND REPRODUCTION NOTE |
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| Terms governing use and reproduction |
Creative Commons |
| -- |
https://creativecommons.org/licenses/by-nc-nd/4.0/ |
| -- |
cc |
| -- |
https://creativecommons.org/licenses/by-nc-nd/4.0/ |
| 546 ## - LANGUAGE NOTE |
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| Language note |
English |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
vibrating ring gyroscope |
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| Uncontrolled term |
n/a |
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| Uncontrolled term |
tunnel magnetoresistive effect |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
optical sensor |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
micro-NIR spectrometer |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
pulse inertia force |
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| Uncontrolled term |
gas sensor |
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| Uncontrolled term |
wet etching |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
oil detection |
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glass welding |
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spring design |
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| Uncontrolled term |
power consumption |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
MEMS (micro-electro-mechanical system) |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
back cavity |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
deflection position detector |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
magnetic |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
MEMS |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
single-layer SiO2 |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
frequency tuning |
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| Uncontrolled term |
threshold accuracy |
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suspended micro hotplate |
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AlGaN/GaN circular HFETs |
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quadrature modulation signal |
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| Uncontrolled term |
inertial switch |
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| Uncontrolled term |
nanoparticle sensor |
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low noise |
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photonic crystal nanobeam cavity |
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floating slug |
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infrared image |
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backstepping approach |
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microdroplet |
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| Uncontrolled term |
acceleration switch |
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| Uncontrolled term |
microgyroscope |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
temperature uniformity |
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methane |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
microfluidic |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
accelerometer design |
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| Uncontrolled term |
photonic crystal cavity |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
anisotropy |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
resonant frequency |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
dual-mass MEMS gyroscope |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
analytical model |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
single crystal silicon |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
temperature sensor |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
micro fluidic |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
refractive index sensor |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
microwave measurement |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
low zero-g offset |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
femtosecond laser |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
micropellistor |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
rapid fabrication |
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| Uncontrolled term |
accelerometer |
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| Uncontrolled term |
tracking performance |
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| Uncontrolled term |
GaN diaphragm |
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| Uncontrolled term |
microactuator |
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| Uncontrolled term |
resistance parameter |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
optomechanical sensor |
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| Uncontrolled term |
scanning grating mirror |
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| Uncontrolled term |
GaAs MMIC |
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| Uncontrolled term |
adaptive control |
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| Uncontrolled term |
frequency split |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
frequency mismatch |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
electrostatic force feedback |
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| Uncontrolled term |
thermoelectric power sensor |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
squeeze-film damping |
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| Uncontrolled term |
silicon |
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| Uncontrolled term |
wideband |
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| Uncontrolled term |
Accelerometer readout |
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| Uncontrolled term |
bonding strength |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
high temperature pressure sensors |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
3D simulation |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
level-set method |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
tetramethylammonium hydroxide (TMAH) |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Jahangir, Ifat |
| Relator code |
auth |
| 9 (RLIN) |
1591698 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Host name |
www.oapen.org |
| Uniform Resource Identifier |
<a href="https://mdpi.com/books/pdfview/book/1827">https://mdpi.com/books/pdfview/book/1827</a> |
| -- |
0 |
| Public note |
DOAB: download the publication |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Host name |
www.oapen.org |
| Uniform Resource Identifier |
<a href="https://directory.doabooks.org/handle/20.500.12854/53149">https://directory.doabooks.org/handle/20.500.12854/53149</a> |
| -- |
0 |
| Public note |
DOAB: description of the publication |
