MARC details
| 000 -LEADER |
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| fixed length control field |
06693cam a2200793Mi 4500 |
| 001 - CONTROL NUMBER |
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| control field |
ocn932525902 |
| 003 - CONTROL NUMBER IDENTIFIER |
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OCoLC |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
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| control field |
20220712023444.0 |
| 006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS--GENERAL INFORMATION |
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| fixed length control field |
m eo d |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION |
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| fixed length control field |
cr cn||||m|||a |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
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| fixed length control field |
151209s2016 nyua foab 001 0 eng d |
| 040 ## - CATALOGING SOURCE |
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| Original cataloging agency |
NYMPP |
| Language of cataloging |
eng |
| Description conventions |
rda |
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pn |
| Transcribing agency |
NYMPP |
| Modifying agency |
N$T |
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OCLCF |
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IDEBK |
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YDXCP |
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EBLCP |
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CUY |
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OCLCQ |
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MERUC |
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STF |
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OCLCQ |
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OCLCO |
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AGLDB |
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G3B |
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IGB |
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OCLCQ |
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OCLCO |
| 019 ## - |
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922701175 |
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986598357 |
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986852493 |
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994072662 |
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994413901 |
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1010972140 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| International Standard Book Number |
9781606505892 |
| Qualifying information |
(electronic bk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| International Standard Book Number |
1606505890 |
| Qualifying information |
(electronic bk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| Cancelled/invalid ISBN |
9781606505885 |
| Qualifying information |
(print) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| Cancelled/invalid ISBN |
1606505882 |
| 029 1# - (OCLC) |
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| OCLC library identifier |
AU@ |
| System control number |
000057032248 |
| 035 ## - SYSTEM CONTROL NUMBER |
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| System control number |
(OCoLC)932525902 |
| Canceled/invalid control number |
(OCoLC)922701175 |
| -- |
(OCoLC)986598357 |
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(OCoLC)986852493 |
| -- |
(OCoLC)994072662 |
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(OCoLC)994413901 |
| -- |
(OCoLC)1010972140 |
| 037 ## - SOURCE OF ACQUISITION |
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| Stock number |
833394 |
| Source of stock number/acquisition |
MIL |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER |
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| Classification number |
QD96.S43 |
| Item number |
S747 2016 |
| 072 #7 - SUBJECT CATEGORY CODE |
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| Subject category code |
SCI |
| Subject category code subdivision |
013010 |
| Source |
bisacsh |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER |
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| Classification number |
543.0873 |
| Edition number |
23 |
| 049 ## - LOCAL HOLDINGS (OCLC) |
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| Holding library |
MAIN |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
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| Personal name |
Stevie, F. A., |
| Relator term |
author. |
| 9 (RLIN) |
1090681 |
| 245 10 - TITLE STATEMENT |
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| Title |
Secondary ion mass spectrometry : |
| Remainder of title |
applications for depth profiling and surface characterization / |
| Statement of responsibility, etc |
Fred A. Stevie. |
| 264 #1 - |
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| -- |
New York [New York] (222 East 46th Street, New York, NY 10017) : |
| -- |
Momentum Press, |
| -- |
2016. |
| 300 ## - PHYSICAL DESCRIPTION |
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| Extent |
1 online resource (1 PDF (xx, 262 pages)) : |
| Other physical details |
illustrations |
| 336 ## - |
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| -- |
text |
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txt |
| -- |
rdacontent |
| 337 ## - |
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| -- |
electronic |
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isbdmedia |
| 338 ## - |
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| -- |
online resource |
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cr |
| -- |
rdacarrier |
| 490 1# - SERIES STATEMENT |
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| Series statement |
Materials characterization and analysis collection, |
| International Standard Serial Number |
2377-4355 |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
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| Bibliography, etc |
Includes bibliographical references and index. |
| 505 0# - FORMATTED CONTENTS NOTE |
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| Formatted contents note |
1. Comparison of surface analytical techniques -- 1.1 Common elemental surface analysis techniques -- 1.2 Introduction to mass spectrometry -- 1.3 Brief history of mass spectrometry and SIMS -- 1.4 Types of mass spectrometry -- 1.5 Rationale for SIMS -- 1.6 Types of SIMS data -- References. |
| 505 8# - FORMATTED CONTENTS NOTE |
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| Formatted contents note |
2. SIMS technique -- 2.1 Interaction of ions with matter -- 2.2 Sputtering process -- 2.3 Sputtering yield -- 2.4 Preferential sputtering -- 2.5 Secondary ion yield -- 2.6 Oxygen flood (oxygen leak, oxygen backfill) -- 2.7 Matrix effects -- References. |
| 505 8# - FORMATTED CONTENTS NOTE |
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| Formatted contents note |
3. Analysis parameters -- 3.1 Parameters of interest for depth profiling -- 3.2 Primary beam polarity and species -- 3.3 Secondary ion polarity and species -- 3.4 Primary beam energy -- 3.5 Primary beam angle of incidence -- 3.6 Primary beam current, raster size -- 3.7 Secondary beam energy distribution, voltage offset -- 3.8 Mass interferences, mass resolution -- References. |
| 505 8# - FORMATTED CONTENTS NOTE |
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| Formatted contents note |
4. Instrumentation -- 4.1 Vacuum system -- 4.2 Overall instrument -- 4.3 Ion sources -- 4.4 Primary ion column -- 4.5 Sample chamber and sample -- 4.6 Secondary ion column and mass analyzers -- 4.7 Detectors -- 4.8 Focused ion beam SIMS (FIB-SIMS) -- 4.9 Computers and data manipulation -- 4.10 Related instruments -- References. |
| 505 8# - FORMATTED CONTENTS NOTE |
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| Formatted contents note |
5. Depth profiling (dynamic SIMS) -- 5.1 Raster and Gate -- 5.2 Depth resolution -- 5.3 Sputtering rate -- 5.4 Nonuniform sputtering, sample rotation -- 5.5 Detection limit, dynamic range, memory effect -- 5.6 Count rate saturation, detector dead time -- 5.7 Small area analysis -- 5.8 Nonuniform distribution -- 5.9 Image depth profile, lateral resolution -- 5.10 Movement of species due to chemical effect -- References. |
| 505 8# - FORMATTED CONTENTS NOTE |
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| Formatted contents note |
6. Quantification -- 6.1 Need for secondary standards -- 6.2 Depth profile quantification, relative sensitivity factors -- 6.3 Ion implanted standards -- 6.4 Bulk standards -- 6.5 Matrix and trace quantification -- 6.6 Useful yield -- 6.7 Precision and accuracy -- 6.8 Quantification in multiple matrixes, cesium cluster ions -- 6.9 Static SIMS quantification -- 6.10 RSF relationship with ionization potential and electron affinity -- References. |
| 505 8# - FORMATTED CONTENTS NOTE |
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| Formatted contents note |
7. Surfaces, interfaces, multilayers, bulk -- 7.1 Sample considerations -- 7.2 Surface, static SIMS -- 7.3 Interfaces -- 7.4 Multilayers -- 7.5 Back side analysis -- 7.6 Bulk analysis -- References. |
| 505 8# - FORMATTED CONTENTS NOTE |
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| Formatted contents note |
8. Insulators -- 8.1 Sample charging -- 8.2 Charge compensation methods -- 8.3 Electron beam neutralization -- 8.4 Species mobile under ion bombardment -- 8.5 Buried insulators -- 8.6 Electron stimulated desorption -- 8.7 Summary -- References. |
| 505 8# - FORMATTED CONTENTS NOTE |
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| Formatted contents note |
9. Residual and rare gas elements -- 9.1 Residual gas elements, raster reduction -- 9.2 Rare gas elements -- References. |
| 505 8# - FORMATTED CONTENTS NOTE |
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| Formatted contents note |
10. Applications -- 10.1 Semiconductors -- 10.2 Organic materials -- 10.3 Minerals, ceramics, catalysts -- 10.4 Metals -- References. |
| 505 8# - FORMATTED CONTENTS NOTE |
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| Formatted contents note |
11. Analysis approach -- 11.1 Initial considerations -- 11.2 Analysis sequence. |
| 500 ## - GENERAL NOTE |
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| General note |
Appendix -- Index. |
| 520 3# - SUMMARY, ETC. |
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| Summary, etc |
Secondary ion mass spectrometry (SIMS) is a mass spectrometric technique for solid materials that can provide elemental analysis at parts per million sensitivity and lateral resolution of 50 nm. When those capabilities are combined with the ability to provide that analysis as a function of depth, SIMS has proved to be a valued technique for a wide range of applications. This book was written to explain a technique that requires an understanding of many details in order to properly obtain and interpret the data. It also will serve as a reference for those who need to provide SIMS data. The book has over 200 figures and the references allow one to trace the development of SIMS and help understand the technique. |
| 500 ## - GENERAL NOTE |
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| General note |
Title from PDF title page (viewed on December 9, 2015). |
| 590 ## - LOCAL NOTE (RLIN) |
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| Local note |
eBooks on EBSCOhost |
| Provenance (VM) [OBSOLETE] |
EBSCO eBook Subscription Academic Collection - Worldwide |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Secondary ion mass spectrometry. |
| 9 (RLIN) |
343975 |
| 650 #6 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Spectrométrie de masse des ions secondaires. |
| 9 (RLIN) |
1090682 |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
SCIENCE |
| General subdivision |
Chemistry |
| -- |
Analytic. |
| Source of heading or term |
bisacsh |
| 9 (RLIN) |
878554 |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Secondary ion mass spectrometry. |
| Source of heading or term |
fast |
| -- |
(OCoLC)fst01110604 |
| 9 (RLIN) |
343975 |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
depth profiling |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
magnetic sector mass analyzer |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
mass spectrometry |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
secondary ion mass spectrometry |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
time-of-flight mass analyzer |
| 653 ## - INDEX TERM--UNCONTROLLED |
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| Uncontrolled term |
quadrupole mass analyzer |
| 655 #4 - INDEX TERM--GENRE/FORM |
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| Genre/form data or focus term |
Electronic books. |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY |
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| Display text |
Print version: |
| International Standard Book Number |
9781606505885 |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
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| Uniform title |
Materials characterization and analysis collection. |
| -- |
2377-4355 |
| 9 (RLIN) |
855466 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
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| Uniform Resource Identifier |
<a href="https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=1079552">https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=1079552</a> |
| 938 ## - |
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ProQuest Ebook Central |
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EBLB |
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EBL4013266 |
| 938 ## - |
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EBSCOhost |
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EBSC |
| -- |
1079552 |
| 938 ## - |
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| -- |
ProQuest MyiLibrary Digital eBook Collection |
| -- |
IDEB |
| -- |
cis32791141 |
| 938 ## - |
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| -- |
Momentum Press |
| -- |
NYMP |
| -- |
9781606505892 |
| 938 ## - |
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YBP Library Services |
| -- |
YANK |
| -- |
12643000 |
| 994 ## - |
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92 |
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INOPJ |
