MARC details
000 -LEADER |
fixed length control field |
06540cam a2200889 i 4500 |
001 - CONTROL NUMBER |
control field |
ocn854583694 |
003 - CONTROL NUMBER IDENTIFIER |
control field |
OCoLC |
005 - DATE AND TIME OF LATEST TRANSACTION |
control field |
20220711204132.0 |
006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS--GENERAL INFORMATION |
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m o d |
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION |
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cr ||||||||||| |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
fixed length control field |
130411s2013 nyu ob 001 0 eng |
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
LC control number |
2020687136 |
040 ## - CATALOGING SOURCE |
Original cataloging agency |
DLC |
Language of cataloging |
eng |
Description conventions |
rda |
Transcribing agency |
DLC |
Modifying agency |
E7B |
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YDXCP |
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OCLCF |
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MEU |
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EBLCP |
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AGLDB |
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VTS |
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AU@ |
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M8D |
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N$T |
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OCLCO |
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AJS |
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OCLCO |
019 ## - |
-- |
858126055 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
Cancelled/invalid ISBN |
9781626180345 |
Qualifying information |
(ebook) |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
9781624179594 |
Qualifying information |
(hardcover) |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
1624179592 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
1626180342 |
Qualifying information |
(electronic bk.) |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
9781626180345 |
Qualifying information |
(electronic bk.) |
029 1# - (OCLC) |
OCLC library identifier |
AU@ |
System control number |
000062327189 |
029 1# - (OCLC) |
OCLC library identifier |
DEBBG |
System control number |
BV043779354 |
029 1# - (OCLC) |
OCLC library identifier |
NZ1 |
System control number |
15195150 |
029 1# - (OCLC) |
OCLC library identifier |
DEBSZ |
System control number |
45073952X |
035 ## - SYSTEM CONTROL NUMBER |
System control number |
(OCoLC)854583694 |
Canceled/invalid control number |
(OCoLC)858126055 |
041 1# - LANGUAGE CODE |
Language code of text/sound track or separate title |
eng |
Language code of original and/or intermediate translations of text |
rus |
050 00 - LIBRARY OF CONGRESS CALL NUMBER |
Classification number |
TK7871.15.S55 |
072 #7 - SUBJECT CATEGORY CODE |
Subject category code |
TEC |
Subject category code subdivision |
008010 |
Source |
bisacsh |
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
Classification number |
621.3815/31 |
Edition number |
23 |
049 ## - LOCAL HOLDINGS (OCLC) |
Holding library |
MAIN |
100 1# - MAIN ENTRY--PERSONAL NAME |
Personal name |
Vasilʹev, V. I︠U︡. |
Fuller form of name |
(Vladislav I︠U︡rʹevich) |
9 (RLIN) |
958834 |
240 10 - UNIFORM TITLE |
Uniform title |
<a href="Tonkie sloi borofosforosilikatnogo stekla v tekhnologii kremnievoæi mikroçelektroniki.">Tonkie sloi borofosforosilikatnogo stekla v tekhnologii kremnievoæi mikroçelektroniki.</a> |
Language of a work |
English |
245 10 - TITLE STATEMENT |
Title |
Borophosphosilicate glass thin films in electronics / |
Statement of responsibility, etc |
Vladislav Yu. Vasilyev. |
264 #1 - |
-- |
New York : |
-- |
Nova Science Publishers, |
-- |
[2013] |
300 ## - PHYSICAL DESCRIPTION |
Extent |
1 online resource. |
336 ## - |
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text |
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txt |
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rdacontent |
337 ## - |
-- |
computer |
-- |
c |
-- |
rdamedia |
338 ## - |
-- |
online resource |
-- |
cr |
-- |
rdacarrier |
490 1# - SERIES STATEMENT |
Series statement |
Materials science and technologies |
490 0# - SERIES STATEMENT |
Series statement |
Electronics and telecommunications research |
500 ## - GENERAL NOTE |
General note |
Translation of: Tonkie sloi borofosforosilikatnogo stekla v tekhnologii kremnievoĭ mikroėlektroniki. |
504 ## - BIBLIOGRAPHY, ETC. NOTE |
Bibliography, etc |
Includes bibliographical references (pages 221-234) and index. |
588 ## - |
-- |
Description based on print version record and CIP data provided by publisher. |
505 0# - FORMATTED CONTENTS NOTE |
Formatted contents note |
BOROPHOSPHOSILICATE GLASS THIN FILMS IN ELECTRONICS ; Library of Congress Cataloging-in-Publication Data ; CONTENTS ; PREFACE ; LIST OF ABBREVIATIONS (IN ORDER OF APPEARANCE) ; LIST OF IMPORTANT SYMBOLS (IN ORDER OF APPEARANCE); INTRODUCTION ; PART 1. BPSG THIN FILM DEPOSITION; Chapter 1 BRIEF HISTORICAL OVERVIEW OF BPSG THIN FILM RESEARCH ; Chapter 2 BASIC BPSG FILM CVD TOOLS AND METHODOLOGY ; 2.1. CVD PROCESS COMPOUNDS ; 2.2. BASIC CVD TOOL DESIGN FOR SILICON DIOXIDE AND GLASS FILM DEPOSITION ; 2.3. SOME BASIC THIN FILM CVD PROCESS PARAMETERS. |
505 8# - FORMATTED CONTENTS NOTE |
Formatted contents note |
Chapter 3 BASIC BPSG CVD KINETIC FEATURES 3.1. BASIC THIN FILM CVD KINETIC FEATURES ; 3.2. BASIC SILICON DIOXIDE THIN FILM CVD KINETIC FEATURES ; 3.3. BASIC SILICATE GLASS THIN FILM CVD KINETIC FEATURES ; 3.4. BASIC AEROSOL FORMATION FEATURES AT GLASS CVD ; Chapter 4 AS-DEPOSITED BPSG FILM STEP COVERAGE AND GAP-FILL ; 4.1. BASIC DEFINITIONS OF STEPPED DEVICE STRUCTURES ; 4.2. BASIC DEFINITIONS FOR THIN FILM CVD ON STEPPED DEVICE STRUCTURES ; 4.3. CHARACTERIZATION OF CVD PROCESSES ON STEPPED STRUCTURES ; 4.4. IMPROVEMENT OF GLASS FILM CVD ON STEPPED STRUCTURES. |
505 8# - FORMATTED CONTENTS NOTE |
Formatted contents note |
Chapter 5 GLASS FILM CVD SCHEMES 5.1. GENERAL THIN FILM CVD PROCESS SCHEME ; 5.2. CVD THIN FILM DEPOSITION PROCESSES CLASSIFICATION ; 5.3. THIN FILM SIO AND SILICATE GLASS DEPOSITION PROCESSES SCHEMES 2; Chapter 6 BPSG FILM INDUSTRIAL CVD TECHNOLOGY ; FINAL REMARKS ON PART 1 ; PART 2. BPSG FILM COMPOSITION, STRUCTURE, AND PROPERTIES ; Chapter 7 BRIEF REVIEW ON BPSG THIN FILM ANALYSIS TECHNIQUES ; 7.1. ANALYTICAL METHODS OVERVIEW ; 7.2. FTIR METHOD IMPLEMENTATION BPSG FILM COMPOSITION ANALYSIS ; 7.3. LASER SCANNING METHOD ; 7.4. MICROSCOPY METHODS. |
505 8# - FORMATTED CONTENTS NOTE |
Formatted contents note |
7.5. TOTAL CHARGE MAPPING METHODS 7.6. SECONDARY ION MASS SPECTROMETRY METHOD ; Chapter 8 BPSG FILM COMPOSITION ; Chapter 9 BPSG FILM STRUCTURE ; 9.1. BRIEF REVIEW OF SILICA STRUCTURE: BASICS AND TERMS ; 9.2. BRIEF REVIEW OF BORON OXIDE AND PHOSPHORUS OXIDE STRUCTURES ; 9.3. BPSG COMPOSITION AND STRUCTURE ; 9.4. DIFFERENCES IN BPSG COMPOSITION AND STRUCTURE ; Chapter 10 BASIC BPSG FILM PROPERTIES ; 10.1. SURFACE MORPHOLOGY OF THIN GLASS FILMS ; 10.2. FILM MECHANICAL STRESS ; 10.3. FILM DENSITY -- FILM POROSITY -- FILM SHRINKAGE ; 10.4. FILM WET ETCH RATE. |
505 8# - FORMATTED CONTENTS NOTE |
Formatted contents note |
10.5. GETTERING PROPERTIES OF BPSG FILMS10.6. ELECTRICAL PROPERTIES OF BPSG FILMS ; 10.7. SUMMARIES OF BPSG FILM PROPERTIES FOR PRODUCTION PROCESSES ; Chapter 11 BPSG FILM FLOW CAPABILITY ; 11.1. BRIEF DESCRIPTION OF GLASS FLOW BASICS ; 11.2. GLASS STRUCTURE FEATURES AND GLASS FLOW CAPABILITY ; 11.3. APPLICATION OF BULK GLASS PARAMETERS TO GLASS THIN FILM ; Chapter 12 BPSG FILM -- AMBIENT MOISTURE INTERACTION ; 12.1. TECHNIQUE FOR ANALYSIS OF MOISTURE EFFECTS IN THIN GLASS FILMS ; 12.2. FILM-MOISTURE INTERACTION ; 12.3. DESCRIPTION OF MOISTURE ABSORPTION EFFECTS IN BPSG FILMS. |
546 ## - LANGUAGE NOTE |
Language note |
Text in English. |
590 ## - LOCAL NOTE (RLIN) |
Local note |
eBooks on EBSCOhost |
Provenance (VM) [OBSOLETE] |
EBSCO eBook Subscription Academic Collection - Worldwide |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Electronic apparatus and appliances |
General subdivision |
Materials. |
9 (RLIN) |
150701 |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Glass coatings. |
9 (RLIN) |
958835 |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Boron compounds. |
9 (RLIN) |
599632 |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Silicon compounds. |
9 (RLIN) |
920067 |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Glass manufacture |
General subdivision |
Chemistry. |
9 (RLIN) |
958836 |
650 #2 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Boron Compounds |
9 (RLIN) |
599632 |
650 #2 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Silicon Compounds |
9 (RLIN) |
920067 |
650 #6 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Verre |
General subdivision |
Revêtements protecteurs. |
9 (RLIN) |
958837 |
650 #6 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Bore |
General subdivision |
Composés. |
9 (RLIN) |
958838 |
650 #6 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Silicium |
General subdivision |
Composés. |
9 (RLIN) |
958839 |
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
TECHNOLOGY & ENGINEERING |
General subdivision |
Electronics |
-- |
Circuits |
-- |
General. |
Source of heading or term |
bisacsh |
9 (RLIN) |
38237 |
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Boron compounds. |
Source of heading or term |
fast |
-- |
(OCoLC)fst00836715 |
9 (RLIN) |
599632 |
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Electronic apparatus and appliances |
General subdivision |
Materials. |
Source of heading or term |
fast |
-- |
(OCoLC)fst00906813 |
9 (RLIN) |
150701 |
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Glass coatings. |
Source of heading or term |
fast |
-- |
(OCoLC)fst00943107 |
9 (RLIN) |
958835 |
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Glass manufacture |
General subdivision |
Chemistry. |
Source of heading or term |
fast |
-- |
(OCoLC)fst00943193 |
9 (RLIN) |
958836 |
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Silicon compounds. |
Source of heading or term |
fast |
-- |
(OCoLC)fst01118665 |
9 (RLIN) |
920067 |
655 #0 - INDEX TERM--GENRE/FORM |
Genre/form data or focus term |
Electronic books. |
655 #4 - INDEX TERM--GENRE/FORM |
Genre/form data or focus term |
7 |
-- |
Electronic books. |
9 (RLIN) |
848615 |
700 1# - ADDED ENTRY--PERSONAL NAME |
Personal name |
Vasilʹev, V. I︠U︡. |
Fuller form of name |
(Vladislav I︠U︡rʹevich) |
9 (RLIN) |
958834 |
776 08 - ADDITIONAL PHYSICAL FORM ENTRY |
Display text |
Print version: |
Title |
Borophosphosilicate glass thin films in electronics |
Place, publisher, and date of publication |
New York : Nova Science Publishers, Inc., [2013] |
International Standard Book Number |
9781624179594 (hardcover) |
Record control number |
(DLC) 2013002527 |
830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
Uniform title |
Materials science and technologies series. |
9 (RLIN) |
926602 |
856 40 - ELECTRONIC LOCATION AND ACCESS |
Uniform Resource Identifier |
<a href="https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=619652">https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=619652</a> |
938 ## - |
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YBP Library Services |
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YANK |
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10898411 |
938 ## - |
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EBSCOhost |
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EBSC |
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619652 |
938 ## - |
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ebrary |
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EBRY |
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ebr10738768 |
938 ## - |
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ProQuest Ebook Central |
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EBLB |
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EBL3022846 |
994 ## - |
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92 |
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INOPJ |