Borophosphosilicate glass thin films in electronics / (Record no. 2756663)

MARC details
000 -LEADER
fixed length control field 06540cam a2200889 i 4500
001 - CONTROL NUMBER
control field ocn854583694
003 - CONTROL NUMBER IDENTIFIER
control field OCoLC
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20220711204132.0
006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS--GENERAL INFORMATION
fixed length control field m o d
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION
fixed length control field cr |||||||||||
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 130411s2013 nyu ob 001 0 eng
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER
LC control number 2020687136
040 ## - CATALOGING SOURCE
Original cataloging agency DLC
Language of cataloging eng
Description conventions rda
Transcribing agency DLC
Modifying agency E7B
-- YDXCP
-- OCLCF
-- MEU
-- EBLCP
-- AGLDB
-- VTS
-- AU@
-- M8D
-- N$T
-- OCLCO
-- AJS
-- OCLCO
019 ## -
-- 858126055
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
Cancelled/invalid ISBN 9781626180345
Qualifying information (ebook)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9781624179594
Qualifying information (hardcover)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 1624179592
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 1626180342
Qualifying information (electronic bk.)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9781626180345
Qualifying information (electronic bk.)
029 1# - (OCLC)
OCLC library identifier AU@
System control number 000062327189
029 1# - (OCLC)
OCLC library identifier DEBBG
System control number BV043779354
029 1# - (OCLC)
OCLC library identifier NZ1
System control number 15195150
029 1# - (OCLC)
OCLC library identifier DEBSZ
System control number 45073952X
035 ## - SYSTEM CONTROL NUMBER
System control number (OCoLC)854583694
Canceled/invalid control number (OCoLC)858126055
041 1# - LANGUAGE CODE
Language code of text/sound track or separate title eng
Language code of original and/or intermediate translations of text rus
050 00 - LIBRARY OF CONGRESS CALL NUMBER
Classification number TK7871.15.S55
072 #7 - SUBJECT CATEGORY CODE
Subject category code TEC
Subject category code subdivision 008010
Source bisacsh
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.3815/31
Edition number 23
049 ## - LOCAL HOLDINGS (OCLC)
Holding library MAIN
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Vasilʹev, V. I︠U︡.
Fuller form of name (Vladislav I︠U︡rʹevich)
9 (RLIN) 958834
240 10 - UNIFORM TITLE
Uniform title <a href="Tonkie sloi borofosforosilikatnogo stekla v tekhnologii kremnievoæi mikroçelektroniki.">Tonkie sloi borofosforosilikatnogo stekla v tekhnologii kremnievoæi mikroçelektroniki.</a>
Language of a work English
245 10 - TITLE STATEMENT
Title Borophosphosilicate glass thin films in electronics /
Statement of responsibility, etc Vladislav Yu. Vasilyev.
264 #1 -
-- New York :
-- Nova Science Publishers,
-- [2013]
300 ## - PHYSICAL DESCRIPTION
Extent 1 online resource.
336 ## -
-- text
-- txt
-- rdacontent
337 ## -
-- computer
-- c
-- rdamedia
338 ## -
-- online resource
-- cr
-- rdacarrier
490 1# - SERIES STATEMENT
Series statement Materials science and technologies
490 0# - SERIES STATEMENT
Series statement Electronics and telecommunications research
500 ## - GENERAL NOTE
General note Translation of: Tonkie sloi borofosforosilikatnogo stekla v tekhnologii kremnievoĭ mikroėlektroniki.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc Includes bibliographical references (pages 221-234) and index.
588 ## -
-- Description based on print version record and CIP data provided by publisher.
505 0# - FORMATTED CONTENTS NOTE
Formatted contents note BOROPHOSPHOSILICATE GLASS THIN FILMS IN ELECTRONICS ; Library of Congress Cataloging-in-Publication Data ; CONTENTS ; PREFACE ; LIST OF ABBREVIATIONS (IN ORDER OF APPEARANCE) ; LIST OF IMPORTANT SYMBOLS (IN ORDER OF APPEARANCE); INTRODUCTION ; PART 1. BPSG THIN FILM DEPOSITION; Chapter 1 BRIEF HISTORICAL OVERVIEW OF BPSG THIN FILM RESEARCH ; Chapter 2 BASIC BPSG FILM CVD TOOLS AND METHODOLOGY ; 2.1. CVD PROCESS COMPOUNDS ; 2.2. BASIC CVD TOOL DESIGN FOR SILICON DIOXIDE AND GLASS FILM DEPOSITION ; 2.3. SOME BASIC THIN FILM CVD PROCESS PARAMETERS.
505 8# - FORMATTED CONTENTS NOTE
Formatted contents note Chapter 3 BASIC BPSG CVD KINETIC FEATURES 3.1. BASIC THIN FILM CVD KINETIC FEATURES ; 3.2. BASIC SILICON DIOXIDE THIN FILM CVD KINETIC FEATURES ; 3.3. BASIC SILICATE GLASS THIN FILM CVD KINETIC FEATURES ; 3.4. BASIC AEROSOL FORMATION FEATURES AT GLASS CVD ; Chapter 4 AS-DEPOSITED BPSG FILM STEP COVERAGE AND GAP-FILL ; 4.1. BASIC DEFINITIONS OF STEPPED DEVICE STRUCTURES ; 4.2. BASIC DEFINITIONS FOR THIN FILM CVD ON STEPPED DEVICE STRUCTURES ; 4.3. CHARACTERIZATION OF CVD PROCESSES ON STEPPED STRUCTURES ; 4.4. IMPROVEMENT OF GLASS FILM CVD ON STEPPED STRUCTURES.
505 8# - FORMATTED CONTENTS NOTE
Formatted contents note Chapter 5 GLASS FILM CVD SCHEMES 5.1. GENERAL THIN FILM CVD PROCESS SCHEME ; 5.2. CVD THIN FILM DEPOSITION PROCESSES CLASSIFICATION ; 5.3. THIN FILM SIO AND SILICATE GLASS DEPOSITION PROCESSES SCHEMES 2; Chapter 6 BPSG FILM INDUSTRIAL CVD TECHNOLOGY ; FINAL REMARKS ON PART 1 ; PART 2. BPSG FILM COMPOSITION, STRUCTURE, AND PROPERTIES ; Chapter 7 BRIEF REVIEW ON BPSG THIN FILM ANALYSIS TECHNIQUES ; 7.1. ANALYTICAL METHODS OVERVIEW ; 7.2. FTIR METHOD IMPLEMENTATION BPSG FILM COMPOSITION ANALYSIS ; 7.3. LASER SCANNING METHOD ; 7.4. MICROSCOPY METHODS.
505 8# - FORMATTED CONTENTS NOTE
Formatted contents note 7.5. TOTAL CHARGE MAPPING METHODS 7.6. SECONDARY ION MASS SPECTROMETRY METHOD ; Chapter 8 BPSG FILM COMPOSITION ; Chapter 9 BPSG FILM STRUCTURE ; 9.1. BRIEF REVIEW OF SILICA STRUCTURE: BASICS AND TERMS ; 9.2. BRIEF REVIEW OF BORON OXIDE AND PHOSPHORUS OXIDE STRUCTURES ; 9.3. BPSG COMPOSITION AND STRUCTURE ; 9.4. DIFFERENCES IN BPSG COMPOSITION AND STRUCTURE ; Chapter 10 BASIC BPSG FILM PROPERTIES ; 10.1. SURFACE MORPHOLOGY OF THIN GLASS FILMS ; 10.2. FILM MECHANICAL STRESS ; 10.3. FILM DENSITY -- FILM POROSITY -- FILM SHRINKAGE ; 10.4. FILM WET ETCH RATE.
505 8# - FORMATTED CONTENTS NOTE
Formatted contents note 10.5. GETTERING PROPERTIES OF BPSG FILMS10.6. ELECTRICAL PROPERTIES OF BPSG FILMS ; 10.7. SUMMARIES OF BPSG FILM PROPERTIES FOR PRODUCTION PROCESSES ; Chapter 11 BPSG FILM FLOW CAPABILITY ; 11.1. BRIEF DESCRIPTION OF GLASS FLOW BASICS ; 11.2. GLASS STRUCTURE FEATURES AND GLASS FLOW CAPABILITY ; 11.3. APPLICATION OF BULK GLASS PARAMETERS TO GLASS THIN FILM ; Chapter 12 BPSG FILM -- AMBIENT MOISTURE INTERACTION ; 12.1. TECHNIQUE FOR ANALYSIS OF MOISTURE EFFECTS IN THIN GLASS FILMS ; 12.2. FILM-MOISTURE INTERACTION ; 12.3. DESCRIPTION OF MOISTURE ABSORPTION EFFECTS IN BPSG FILMS.
546 ## - LANGUAGE NOTE
Language note Text in English.
590 ## - LOCAL NOTE (RLIN)
Local note eBooks on EBSCOhost
Provenance (VM) [OBSOLETE] EBSCO eBook Subscription Academic Collection - Worldwide
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Electronic apparatus and appliances
General subdivision Materials.
9 (RLIN) 150701
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Glass coatings.
9 (RLIN) 958835
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Boron compounds.
9 (RLIN) 599632
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Silicon compounds.
9 (RLIN) 920067
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Glass manufacture
General subdivision Chemistry.
9 (RLIN) 958836
650 #2 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Boron Compounds
9 (RLIN) 599632
650 #2 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Silicon Compounds
9 (RLIN) 920067
650 #6 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Verre
General subdivision Revêtements protecteurs.
9 (RLIN) 958837
650 #6 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Bore
General subdivision Composés.
9 (RLIN) 958838
650 #6 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Silicium
General subdivision Composés.
9 (RLIN) 958839
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element TECHNOLOGY & ENGINEERING
General subdivision Electronics
-- Circuits
-- General.
Source of heading or term bisacsh
9 (RLIN) 38237
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Boron compounds.
Source of heading or term fast
-- (OCoLC)fst00836715
9 (RLIN) 599632
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Electronic apparatus and appliances
General subdivision Materials.
Source of heading or term fast
-- (OCoLC)fst00906813
9 (RLIN) 150701
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Glass coatings.
Source of heading or term fast
-- (OCoLC)fst00943107
9 (RLIN) 958835
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Glass manufacture
General subdivision Chemistry.
Source of heading or term fast
-- (OCoLC)fst00943193
9 (RLIN) 958836
650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Silicon compounds.
Source of heading or term fast
-- (OCoLC)fst01118665
9 (RLIN) 920067
655 #0 - INDEX TERM--GENRE/FORM
Genre/form data or focus term Electronic books.
655 #4 - INDEX TERM--GENRE/FORM
Genre/form data or focus term 7
-- Electronic books.
9 (RLIN) 848615
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Vasilʹev, V. I︠U︡.
Fuller form of name (Vladislav I︠U︡rʹevich)
9 (RLIN) 958834
776 08 - ADDITIONAL PHYSICAL FORM ENTRY
Display text Print version:
Title Borophosphosilicate glass thin films in electronics
Place, publisher, and date of publication New York : Nova Science Publishers, Inc., [2013]
International Standard Book Number 9781624179594 (hardcover)
Record control number (DLC) 2013002527
830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE
Uniform title Materials science and technologies series.
9 (RLIN) 926602
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=619652">https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=619652</a>
938 ## -
-- YBP Library Services
-- YANK
-- 10898411
938 ## -
-- EBSCOhost
-- EBSC
-- 619652
938 ## -
-- ebrary
-- EBRY
-- ebr10738768
938 ## -
-- ProQuest Ebook Central
-- EBLB
-- EBL3022846
994 ## -
-- 92
-- INOPJ
Holdings
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