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Advanced micro-device engineering VIII : selected, peer reviewed papers from the 3rd International Symposium of Gunma University Medical Innovation and 8th International Conference on Advanced Micro Device Engineering (GUMI & AMDE 2016), December 9, 2016, Kiryu, Japan / edited by Osamu Hanaizumi. - 1 online resource : illustrations - Key Engineering Materials ; volume 790 . - Key engineering materials ; v. 790. .

Includes bibliographical references and indexes.

ISBN: 9783035732184 (electronic bk.) 3035732183 (electronic bk.)

Subjects--Topical Terms:
Nanotechnology--Research--Congresses.
Microelectromechanical systems--Research--Congresses.
Miniature electronic equipment--Technological innovations--Congresses.
Microelectronics--Technological innovations--Congresses.
Mechatronics--Technological innovations--Congresses.
Microsystèmes électromécaniques--Recherche--Congrès.
Équipement électronique miniaturisé--Innovations--Congrès.
Microélectronique--Innovations--Congrès.
Mécatronique--Innovations--Congrès.
TECHNOLOGY & ENGINEERING--Engineering (General)
TECHNOLOGY & ENGINEERING--Reference.
Nanotechnology--Research.
Microelectronics--Technological innovations.
Nanotechnology.

Index Terms--Genre/Form:
Electronic books.
Conference papers and proceedings.

LC Class. No.: T174.7

Dewey Class. No.: 620/.5