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Ultra Clean Processing of Semiconductor Surfaces XIII.

Mertens, Paul W.

Ultra Clean Processing of Semiconductor Surfaces XIII. - Zurich : Trans Tech Publications, 2016. - 1 online resource (395 pages) - Solid State Phenomena Vol. 255 . - Solid State Phenomena Vol. 255. .

Includes bibliographical references at the end of each chapters and index.

ISBN: 9783035730845 3035730849

Subjects--Topical Terms:
Semiconductors--Surfaces--Congresses.
Semiconductors--Congresses.
Semi-conducteurs--Surfaces--Congrès.
Semi-conducteurs--Congrès.
SCIENCE--Physics--Electricity.
SCIENCE--Physics--Electromagnetism.
Semiconductors.
Semiconductors--Surfaces.

Index Terms--Genre/Form:
Electronic books.
Electronic books.
Conference papers and proceedings.

LC Class. No.: QC611.6.S9 / U377 2016

Dewey Class. No.: 621.38152

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