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Micro electro mechanical systems (MEMS) : technology, fabrication processes, and applications /

Micro electro mechanical systems (MEMS) : technology, fabrication processes, and applications / editors, Britt Ekwall and Mikkel Cronquist. - 1 online resource - Nanotechnology science and technology . - Nanotechnology science and technology series. .

Includes bibliographical references and index.

ISBN: 9781613246986 pdf 1613246986 hardcover : alk. paper

LCCN: 2019721333

Subjects--Topical Terms:
Microelectromechanical systems.
Microsystèmes électromécaniques.
TECHNOLOGY & ENGINEERING--Mechanical.
Microelectromechanical systems.

Index Terms--Genre/Form:
Electronic books.
Electronic books.

LC Class. No.: TK7875

Dewey Class. No.: 621

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