NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore /
NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore /
edited by Lynn Khine and Julius M. Tsai.
- Durnten-Zurich ; Enfield, NH : Trans Tech, ©2011.
- 1 online resource (x, 229 pages) : illustrations (some color)
- Advanced materials research, v. 254 1022-6680 ; .
- Advanced materials research ; v. 254. .
Includes bibliographical references and indexes.
NEMS/MEMS Technology and Devices, ICMAT2011; Preface; Table of Contents; Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors; Thick-Film Deposition of High-Viscous Liquid Photopolymer; Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application; Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever; Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure; Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force. A Static Micromixer Inspired from Fractal-Like Natural Flow SystemsAlN Actuator for Tunable RFMEMS Capacitor; GEMS: A MEMS-Based Way for the Innervation of Materials; On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems; Design Consideration of Membrane Structure for Thermal Actuated Micropump; Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator; Fabrication of a Peltier Device Based on InSb and SbTe Thin Films; Gapfill Study of Polyimides for MEMS Applications. A Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film TransistorWireless Imaging Module Assembly and Integration for Capsule Endoscopic Applications; Low Cost and High Resolution X-Ray Lithography for Fabrication of Microactuator; FBAR Resonators with Sufficient High Q for RF Filter Implementation; Evaluation of Piezoelectric Properties of AlN Using MEMS Resonators; Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis; Silicon Probes for Cochlear Auditory Nerve Stimulation and Measurement. Area-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid FilmA New Peltier Device with a Coaxial Thermocouple; A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier Device; Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography; Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches; Double-Step Plasma Etching for SiO2 Microcantilever Release; Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic Resonators.
The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic. Review from Book News Inc.: Papers from a summer 2011 symposium shed light on new devices, process innovations, and engineering applicati.
English.
9783038136095 (electronic bk.) 3038136093 (electronic bk.) 9781621986850 (electronic bk.) 1621986853 (electronic bk.)
2011377926
015840275 Uk
Nanoelectromechanical systems--Congresses.
Microelectromechanical systems--Congresses.
Nanosystèmes électromécaniques--Congrès.
Microsystèmes électromécaniques--Congrès.
SCIENCE--Nanoscience.
TECHNOLOGY & ENGINEERING--Nanotechnology & MEMS.
Microelectromechanical systems.
Nanoelectromechanical systems.
NEMS/MEMS technology Materials Advanced technologies ICMAT
Electronic books.
Electronic books.
Conference papers and proceedings.
TK7875 / .I538 2011eb
620.5
Includes bibliographical references and indexes.
NEMS/MEMS Technology and Devices, ICMAT2011; Preface; Table of Contents; Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors; Thick-Film Deposition of High-Viscous Liquid Photopolymer; Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application; Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever; Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure; Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force. A Static Micromixer Inspired from Fractal-Like Natural Flow SystemsAlN Actuator for Tunable RFMEMS Capacitor; GEMS: A MEMS-Based Way for the Innervation of Materials; On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems; Design Consideration of Membrane Structure for Thermal Actuated Micropump; Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator; Fabrication of a Peltier Device Based on InSb and SbTe Thin Films; Gapfill Study of Polyimides for MEMS Applications. A Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film TransistorWireless Imaging Module Assembly and Integration for Capsule Endoscopic Applications; Low Cost and High Resolution X-Ray Lithography for Fabrication of Microactuator; FBAR Resonators with Sufficient High Q for RF Filter Implementation; Evaluation of Piezoelectric Properties of AlN Using MEMS Resonators; Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis; Silicon Probes for Cochlear Auditory Nerve Stimulation and Measurement. Area-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid FilmA New Peltier Device with a Coaxial Thermocouple; A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier Device; Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography; Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches; Double-Step Plasma Etching for SiO2 Microcantilever Release; Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic Resonators.
The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic. Review from Book News Inc.: Papers from a summer 2011 symposium shed light on new devices, process innovations, and engineering applicati.
English.
9783038136095 (electronic bk.) 3038136093 (electronic bk.) 9781621986850 (electronic bk.) 1621986853 (electronic bk.)
2011377926
015840275 Uk
Nanoelectromechanical systems--Congresses.
Microelectromechanical systems--Congresses.
Nanosystèmes électromécaniques--Congrès.
Microsystèmes électromécaniques--Congrès.
SCIENCE--Nanoscience.
TECHNOLOGY & ENGINEERING--Nanotechnology & MEMS.
Microelectromechanical systems.
Nanoelectromechanical systems.
NEMS/MEMS technology Materials Advanced technologies ICMAT
Electronic books.
Electronic books.
Conference papers and proceedings.
TK7875 / .I538 2011eb
620.5